Sub-Fab

Lowering Chip Manufacturing's Carbon Footprint

Lowering Chip Manufacturing's Carbon Footprint

Lots of innovation in the semiconductor industry goes towards making chips more energy-efficient. Less attention is paid to lowering the carbon footprint of the chip manufacturing process itself.Now, Applied's engineers have developed a smart technology that conserves resources by synchronizing the process tools in the fab with their support systems in the subfab. The new technology can reduce CO2 emissions for a CVD[1] chip processing system by 220,000 pounds annually[2]. When you consider that a modern fab may have more than 200 tools that could use this “green” solution, the total opportunity to lower the carbon footprint becomes quite impressive.